MEMS AND Microsystems: Design And Manufacture

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Hsu's textbook is the first to provide a comprehensive overview of MEMS and microsystems for engineering students. The author provides the background information needed to understand microtechnologies, including solid mechanics, physics, and materials. Design and manufacturing aspects of MEMS are covered extensively; and the author chooses examples and applications from a variety of areas, including telecommunications, biomedical device design, manufacturing systems, mechanical systems and aerospace applications. Packaging aspects are also discussed, in the context of MEMS design and manufacture. Key Features Comprehensive view of MEMS and MicroSystems and their current applications. Wouldn't it best for students to get information on MEMS from one book rather than from a compilation? Appropriate for any engineering major needing to learn about MEMS. Review sections cover all needed background topics, such as measurement & units, solid mechanics for microsystems, thermal and heat transfer topics, and overview of electronic materials. Do students interested in this area come from a variety of disciplines? Makes the book appropriate for all engineering majors; they can review the background concepts they may not have gotten in previous majors courses. Strong coverage of the design aspects associated with MEMS. The book is not just descriptive in nature--it shows how engineers work to design MEMS components and how they design microsystems. The book contains numerous worked-out examples, and extensive chapter-ending problems. Don't you agree that cuting edge topics need to be organized appropriately for teaching situations in order for students to learn the material? Students need pedagogical features to help them learn; and professors need good problems to assign as homework or as test items. Table Of Contents Chapter 1 Overview of MEMS and Microsystems Chapter 2 Working Principles of Microsystems Chapter 3 Engineering Science for Microsystem Design and Fabrication Chapter 4 Engineering Mechanics for Microsystems Design Chapter 5 Thermofluid Engineering and Microsystem Design Chapter 6 Scaling Laws in Miniaturization Chapter 7 Materials for MEMS and Microsystems Chapter 8 Microsystem Fabrication Processes Chapter 9 Overview of Micromanufacturing Chapter 10 Microsystems Design Chapter 11 Microsystem Packaging Bibliography Index