Micro And Smart Systems

0.0

This book essentially deals with the basics of microsystem technology and is intended principally as a textbook at the undergraduate level; however, it can also be used as background book at the postgraduate level. The book makes an effort to provide an introduction to smart materials and systems. The aim of this book is to present adequate modeling details so that readers can appreciate the analysis involved in microsystems (and to some extent, smart systems) and thereby enabling them to get an in-depth understanding about simulation and design. Therefore, the book will also be useful to practicing researchers in all branches of science and engineering, who might be interested in applications where they can use this technology. The book presents adequate details of modeling of microsystems as well as addresses their fabrication and integration.

0.0

Prof. G.K. Ananthasuresh is a Professor of Mechanical Engineering in the IISc, Bangalore, India. He has been working in the microsystems area since 1991 with emphasis on modeling and design. Prof. Ananthasuresh has edited the first book on Optimal Synthesis Methods for MEMS. Prof. K.J. Vinoy (B.Tech., Kerala, 1991; M.Tech., Cochin, 1992; PhD, Pennsylvania State 2002) is an Associate Professor in the Department of Electrical Communication Engineering at the IISc, Bangalore. This is his third book in the area of Microsystems. Prof. Gopalakrishnan is a Professor in the Department of Aerospace Engineering at IISc. He is a Fellow of INAE. Prof. Gopalakrishnan is the Chairman of the Aerospace Applications and Structural Health Monitoring group of the National Programme on Micro and Smart Systems. Prof. K.N. Bhat was a professor at IIT Madras and is currently a Visiting Professor at IISc. He is a Fellow of the INAE. He has immensely contributed to the growth of VLSI and MEMS technology, Education and Manpower development in India. Prof. V.K. Aatre was the Director General of DRDO and Scientific Adviser to the Defence Minister, Government of India. He is a Fellow of IEEE and INAE and is a recipient of the prestigious Padma Bhushan Award in India. He initiated two national programmes on Micro and Smart Systems founded the Institute of Smart Structures and Systems (ISSS). Table of Contents Introduction Micro Sensors, Actuators, Systems and Smart Materials: An Overview Micromachining Technologies Modeling of Solids in Microsystems Finite Element Method Modeling of Coupled Electromechanical Systems Electronics Circuits and Control for Micro and Smart Systems Integration of Micro and Smart Systems Scaling Effects in Microsystems Glossary Index