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Wafer Level 3-D ICs Process Technology (Integrated Circuits and Systems)

Wafer Level 3-D ICs Process Technology (Integrated Circuits and Systems)

by Chuan Seng Tan, Ronald J. Gutmann and L. Rafael Reif

  • ISBN

    :  

    9780387765327

  • Publisher

    :  

    Springer

  • Subject

    :  

    Technology, Engineering, Agriculture, Technology: General Issues, Physics

  • Binding

    :  

    HARDCOVER

  • Pages

    :  

    422

  • Year

    :  

    2008

18759.0

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  • Description

    This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging. This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.

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