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Computational Modeling in Semiconductor Processing 14.0%OFF

Computational Modeling in Semiconductor Processing

by M. Meyyappan

  • ISBN

    :  

    9780890067079

  • Publisher

    :  

    Artech House Publishers

  • Subject

    :  

    Technology: General Issues

  • Binding

    :  

    Hardcover

  • Pages

    :  

    363

  • Year

    :  

    1994

₹

5001.0

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4300.0

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  • Description

    Provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition and plasma processing, as well as defining the basic principles of transport phenomena.

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